A brief application of wireless temperature measurement products in semiconductor factories

Abstract: Semiconductors are known as the "brains of manufacturing". They dominate major industries and key areas related to national security and the lifeline of the national economy, and are an important pillar of the national economy. With the development of digital technology and the increasing proportion of the digital economy in the national economy, the importance of the semiconductor industry will further increase. Safe and reliable power supply is the basic guarantee for safe production. This article is aimed at the power supply and distribution system engineering project of semiconductor production. According to the specific requirements, wireless temperature measurement devices are reasonably selected to detect the temperature of sensitive equipment in the substation to prevent local equipment temperatures from being too high and causing fires. Wireless temperature measurement systems are also used. Monitoring and control realize electrical automation of power supply and distribution systems and enterprise production. This system can safely, reliably and conveniently obtain real-time temperature information of power equipment, achieve remote fault warning and status analysis, and provide support for ensuring the safe operation of the semiconductor factory power grid.

Keywords: semiconductor; wireless temperature measurement; wireless temperature measurement system.

1. Overview: This semiconductor factory project needs to be based on the real-time monitoring and fault warning management requirements of the user's power distribution system. It requires power data collection for each circuit of the 10kV and 0.4kV power distribution room of the semiconductor factory and real-time temperature monitoring of the electrical nodes in the power distribution cabinet. Achieve early warning of hidden dangers, early detection and early investigation to ensure the normal operation of the power distribution system in the semiconductor workshop.

Based on the actual production process requirements of the user, this time, intelligent power meters will be installed on all 10kV and 0.4kV circuits of Factory 1 and Factory 2, and the 0.4kV incoming cabinets, capacitor cabinets, bus tie cabinets and outlet wires of Factory 1 and Factory 2 will be installed. The cabinet is equipped with 6 temperature sensors. A power monitoring system is set up in the monitoring center on the first floor of Factory Building 1 to collect and manage power meter and wireless temperature measurement data in real time to ensure the reliable operation of the semiconductor power distribution system.

2 Product requirements

This time, for a semiconductor project in Zhejiang, wireless temperature measurement products need to be configured. The sensor requirements for this project are as follows:

1) Non-battery powered (powered by induction power supply) wireless temperature sensor

2) Wireless frequency: 470MHz;

3) Starting current: ≥5A;

4) Temperature measurement range: -50 ℃ ~ +125 ℃;

5) Sampling frequency: 15s;

6) Transmission frequency: 15s;

7) Accuracy: ±1℃;

8) Working temperature: -40 ℃ ~ +85 ℃;

9) Maximum working current: primary rated current 5000 A;

10) Temperature rise requirements: Under rated working conditions, the device should not reach a temperature that may affect the insulation of the primary equipment of the switch cabinet and the normal operation of the measured point. The current transformer coil of the device passes 1250 A, 30 minutes, and the ambient temperature is 20 ℃ , the surface temperature rise of the wireless temperature sensor should not exceed 10 K.

11) Transmission distance: The open distance is no more than 150 meters.

The receiver requirements for this project are as follows:

1) Working power supply: AC/DC85V-264V power supply; DC12~48V power supply;

2) Transmission distance: the open distance is no more than 150 meters;

3) Communication interface: 1 channel RS485 serial communication interface, Modbus-RTU communication protocol;

4) Installation method: 35mm guide rail type;

5) Number of measuring points: no less than 240 points;

6) High temperature alarm: 2 alarm outlets.

Based on the above requirements, Ankerui’s wireless temperature measurement products are selected as shown in the table below.

3 product solutions

Taking the power distribution room of the No. 2 factory building as an example, the conditions of other power distribution rooms can be adjusted according to the actual situation. This power distribution room has 0.4kV 3-segment busbars. The No. 1 busbar (T7) has 5 outlet cabinets, 1 UPS cabinet, 1 edge filter cabinet, and 2 reactive power compensation SVG cabinets. The outlet cabinet has a total of 35 outlet drawers. Bus No. 2 (T8) has three outlet cabinets, one edged filter cabinet, and one reactive power compensation SVG cabinet. The outlet cabinet has a total of 19 outlet circuits. Bus No. 3 (T9) has one outlet cabinet and one incoming cabinet. There is a reactive power compensation SVG cabinet on one side, and the outlet cabinet has a total of 9 outlet circuits. The busbar plan is shown in Figure 1, and the power distribution room plan is shown in Figure 2. The distance between the gateway and the farthest 0.4kV switch cabinet is no more than 30 meters.